Vacuum Pump Inlet Trap

For heavy contaminant vacuum processes


A high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes has been introduced by Mass-Vac, Inc. of North Billerica, MA, USA.

The MV Multi-Trap 16” (406.4 mm) High-Capacity Vacuum Inlet Trap for heavy contaminant producing processes features a stainless steel housing with a large knockdown stage and a large pleated filter made from high-temperature polyester to capture and retain large quantities of particulates. Offered in a single or stacked configuration, it is available with NW-40 to ISO-160 ports in straight-through and right angle configurations.

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Providing a conductance of > 2000 CFM @ 1 TORR, the MV Multi-Trap 16” (406.4 mm) High-Capacity Vacuum Inlet Trap can be supplied with 25- and 100-micron polyester ratings. The single stage filter has a 3.72 sq. meter surface area and the stacked version provides 7.43 sq. meter. A cooling option is offered for condensable materials and adsorption filter media and inlet purge ports are available for ALD processes.


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